Uniaxial anisotropy field, H(k), and local anisotropy fluctuation represented as magnetic ripple, S, were studied as a function of argon pressure during deposition for the RF sputtered amorphous FeBSi films. Influence of P(Ar) on H(k), K(loc), and S (structure constant) is discussed. The magnitude of S and K(loc) d3/2 were found to be strongly dependent on P(Ar).