HIGH BRIGHTNESS LASER PLASMA SOURCE FOR HIGH THROUGHPUT SUB-MICRON X-RAY-LITHOGRAPHY

被引：10
|
作者：
HOFFMAN, AL
ALBRECHT, GF
CRAWFORD, EA
机构：
[1] Mathematical Sciences Northwest Inc,, Bellevue, WA, USA, Mathematical Sciences Northwest Inc, Bellevue, WA, USA
来源：
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY B | 1985年 / 3卷 / 01期
关键词：
D O I：
10.1116/1.583239
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
X-RAY AND GAMMA RAY PRODUCTION
引用
收藏
页码：258 / 261
页数：4
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