PREFERENTIAL NUCLEATION ALONG SIO2 STEPS IN AMORPHOUS SI

被引：29
|
作者：
MONIWA, M
MIYAO, M
TSUCHIYAMA, R
ISHIZAKA, A
ICHIKAWA, M
SUNAMI, H
TOKUYAMA, T
机构：
来源：
APPLIED PHYSICS LETTERS | 1985年 / 47卷 / 02期
关键词：
D O I：
10.1063/1.96286
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：113 / 115
页数：3
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