OBSERVATION OF A VISIBLE LINE EMISSION FROM RF AND ECR OXYGEN PLASMAS

被引：0
|
作者：
SAKAMOTO, Y
KOKAI, H
KOMURO, S
UCHIYAMA, T
KASHIWAGI, K
MORIKAWA, T
MURAYAMA, Y
机构：
[1] Department of Electrical Engineering, Toyo University, Kawagoe, Saitama
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 1-REGULAR PAPERS SHORT NOTES & REVIEW PAPERS | 1990年 / 29卷 / 11期
关键词：
ECR PLASMA; RF PLASMA; SPECTROSCOPY; SHEATH;
D O I：
10.1143/JJAP.29.2499
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Spatial distributions of 777-nm (3s5S-3pP5) emission for oxygen ECR (2.45 GHz) and RF (13.56 MHz) plasmas are observed near an electrode. For the ECR plasma, a peak in the emission near the resonance zone was observed under a certain pressure (4 x 10(-3) Torr) accompanied by a decrease in the emission toward the electrode. For the RF plasma, an increase in the emission toward the electrode was observed.
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页码：2499 / 2500
页数：2
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