COMPARISONS BETWEEN A GAS-PHASE MODEL OF SILANE CHEMICAL VAPOR-DEPOSITION AND LASER-DIAGNOSTIC MEASUREMENTS

被引：86
作者：
BREILAND, WG
COLTRIN, ME
HO, P
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1986年 / 59卷 / 09期
关键词：
D O I：
10.1063/1.336909
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：3267 / 3273
页数：7
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