PROBING SEMICONDUCTOR INTERFACES BY TRANSMISSION ELECTRON-MICROSCOPY

被引:0
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作者
STEEDS, JW
CHERNS, D
机构
关键词
D O I
10.1098/rsta.1993.0107
中图分类号
O [数理科学和化学]; P [天文学、地球科学]; Q [生物科学]; N [自然科学总论];
学科分类号
07 ; 0710 ; 09 ;
摘要
The aim of this article is to review the many available techniques in transmission electron microscopy, drawing attention to their particular characteristics and strengths. Where techniques are well established, the reader is referred to standard reference texts. Greater detail is given about new and emerging techniques which hold promise for even more detailed future study of semiconductor interfaces.
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页码:545 / 556
页数:12
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