PREPARATION AND PROPERTIES OF REACTIVELY SPUTTERED SILICON NITRIDE

被引：15

|

作者：

JANUS, AR

SHIRN, GA

机构：

来源：

JOURNAL OF VACUUM SCIENCE & TECHNOLOGY | 1967年 / 4卷 / 01期

关键词：

D O I：

10.1116/1.1492515

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

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页码：37 / &

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