PROPERTIES OF TRANSPARENT, CONDUCTING ZNO FILMS DEPOSITED BY REACTIVE BIAS SPUTTERING

被引：34
|
作者：
BRETT, MJ
PARSONS, RR
机构：
来源：
SOLID STATE COMMUNICATIONS | 1985年 / 54卷 / 07期
关键词：
D O I：
10.1016/0038-1098(85)90087-0
中图分类号：
O469 [凝聚态物理学];
学科分类号：
070205 ;
摘要：
引用
收藏
页码：603 / 606
页数：4
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