HIGH-RESOLUTION ELECTRON-MICROSCOPY STUDY OF SI-SIO2 INTERFACE

被引:63
作者
KRIVANEK, OL
SHENG, TT
TSUI, DC
机构
关键词
D O I
10.1063/1.90077
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:437 / 439
页数:3
相关论文
共 19 条
[1]   SI-SIO2 INTERFACE EXAMINED BY CROSS-SECTIONAL TRANSMISSION ELECTRON-MICROSCOPY [J].
BLANC, J ;
BUIOCCHI, CJ ;
ABRAHAMS, MS ;
HAM, WE .
APPLIED PHYSICS LETTERS, 1977, 30 (02) :120-122
[2]   ESCA STUDY OF OXIDE AT SI-SIO2 INTERFACE [J].
CLARKE, RA ;
TAPPING, RL ;
HOPPER, MA ;
YOUNG, L .
JOURNAL OF THE ELECTROCHEMICAL SOCIETY, 1975, 122 (10) :1347-1350
[3]   INFLUENCE OF A ONE-DIMENSIONAL SUPERLATTICE ON 2-DIMENSIONAL ELECTRON-GAS [J].
COLE, T ;
LAKHANI, AA ;
STILES, PJ .
PHYSICAL REVIEW LETTERS, 1977, 38 (13) :722-725
[4]  
COWLEY JM, 1977, PHYS TODAY, V30, P31
[5]   ELECTRON MEAN ESCAPE DEPTHS FROM X-RAY PHOTOELECTRON-SPECTRA OF THERMALLY OXIDIZED SILICON DIOXIDE FILMS ON SILICON [J].
FLITSCH, R ;
RAIDER, SI .
JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1975, 12 (01) :305-308
[6]  
HELMS CR, 7TH P INT VAC C
[7]  
HELMS CR, 1977, 3RD INT C SOL SURF V, P2241
[8]   LEED-INVESTIGATION OF STEP ARRAYS ON CLEAVED GERMANIUM (111) SURFACES [J].
HENZLER, M .
SURFACE SCIENCE, 1970, 19 (01) :159-&
[9]  
IZUI K, 1977, J ELECTRON MICROSC, V26, P129
[10]   PHASE SEPARATION IN SILICON OXIDES AS SEEN BY AUGER-ELECTRON SPECTROSCOPY [J].
JOHANNESSEN, JS ;
SPICER, WE ;
STRAUSSER, YE .
APPLIED PHYSICS LETTERS, 1975, 27 (08) :452-454