COMPARATIVE STUDIES OF VERY THIN SHADOWING FILMS PRODUCED BY ATOM BEAM SPUTTERING AND ELECTRON-BEAM EVAPORATION

被引:17
|
作者
WILDHABER, I
GROSS, H
MOOR, H
机构
[1] ETH-Hoenggerberg, Inst fuer, Zellbiologie, Zurich, Switz, ETH-Hoenggerberg, Inst fuer Zellbiologie, Zurich, Switz
关键词
We thank H.P. Winkler for his help with the image processing. This work was supported by the Swiss National Science Foundation grant No. 3.2.83-0.82;
D O I
10.1016/0304-3991(85)90100-7
中图分类号
TH742 [显微镜];
学科分类号
摘要
19
引用
收藏
页码:321 / 330
页数:10
相关论文
共 50 条
  • [1] FABRICATION OF CDTE THIN-FILMS BY ELECTRON-BEAM EVAPORATION
    CAPORALETTI, O
    WESTCOTT, MR
    CANADIAN JOURNAL OF PHYSICS, 1985, 63 (06) : 798 - 800
  • [2] Stress control in optical thin films by sputtering and electron beam evaporation
    Tajima, Naoya
    Murotani, Hiroshi
    Matsumoto, Shigeharu
    Honda, Hiromitsu
    APPLIED OPTICS, 2017, 56 (04) : C131 - C135
  • [3] ELECTRON-BEAM LITHOGRAPHY WITH VERY THIN, HIGHLY ORDERED FILMS
    BOOTHROYD, B
    DELANEY, PA
    HANN, RA
    JOHNSTONE, RAW
    POLYMER DEGRADATION AND STABILITY, 1987, 17 (03) : 253 - 262
  • [4] FULLERENE FORMATION IN SPUTTERING AND ELECTRON-BEAM EVAPORATION PROCESSES
    BUNSHAH, RF
    JOU, SK
    PRAKASH, S
    DOERR, HJ
    ISAACS, L
    WEHRSIG, A
    YERETZIAN, C
    CYNN, HC
    DIEDERICH, F
    JOURNAL OF PHYSICAL CHEMISTRY, 1992, 96 (17): : 6866 - 6869
  • [5] Effect of Au on the crystallization of germanium thin films by electron-beam evaporation
    Eygi, Zeynep Deniz
    Kulakci, Mustafa
    Turan, Rasit
    APPLIED SURFACE SCIENCE, 2014, 318 : 116 - 120
  • [6] ELECTRON-BEAM FLASH EVAPORATION FOR YBACUO AND BICASRCUO THIN-FILMS
    DAVIS, MF
    WOSIK, JL
    WOLFE, JC
    JOURNAL OF APPLIED PHYSICS, 1989, 66 (10) : 4903 - 4908
  • [7] OPTICAL DIAGNOSTICS FOR THIN CDS FILMS FABRICATED BY ELECTRON-BEAM SPUTTERING
    BOGDANOV, SV
    VOLKOV, VT
    MASLENNIKOV, IV
    PRONIN, AN
    INORGANIC MATERIALS, 1991, 27 (05) : 750 - 753
  • [8] CALCULATION OF THE THICKNESS OF A FILM PRODUCED BY ELECTRON-BEAM EVAPORATION
    SABIROV, RS
    SOVIET JOURNAL OF OPTICAL TECHNOLOGY, 1985, 52 (07): : 395 - 396
  • [9] Comparative studies of ZnO thin films grown by electron beam evaporation, pulsed laser and RF sputtering technique for optoelectronics applications
    Kumar, Rashmi Ranjan
    Sekhar, Muddam Raja
    Raghvendra
    Laha, Ranjit
    Pandey, Saurabh Kumar
    APPLIED PHYSICS A-MATERIALS SCIENCE & PROCESSING, 2020, 126 (11):
  • [10] Comparative studies of ZnO thin films grown by electron beam evaporation, pulsed laser and RF sputtering technique for optoelectronics applications
    Rashmi Ranjan Kumar
    Muddam Raja Sekhar
    Ranjit Raghvendra
    Saurabh Kumar Laha
    Applied Physics A, 2020, 126