STUDY OF HREELS AND XPS ON SULFIDE PASSIVATED GAAS(100) SURFACE

被引：0
|
作者：
ZHU, JH
HOU, XY
DING, XM
JIN, XF
CHEN, P
机构：
来源：
CHINESE PHYSICS | 1992年 / 12卷 / 03期
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中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
High resolution electron energy loss spectroscopy (HREELS) combined with XPS is used to study sulfide passivated GaAs(100) surface. The result of HREELS. which is consistent with that of XPS, has proved that after passivation the native oxide of GaAs(100) surface is completely removed and a passivation layer mainly composed of As-S bonds is formed on the sample surface. The main contaminations of the passivated surface are water and hydrocarbons. An additional treatment of soaking the sample in concentrated HCl prior to the passivation leads to complte removal of the contaminations after vaccum annealing.
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页码：753 / 757
页数：5
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