FORMATION, STRUCTURE, AND ORIENTATION OF GOLD SILICIDE ON GOLD SURFACES

被引:157
作者
GREEN, AK [1 ]
BAUER, E [1 ]
机构
[1] USN NAVAL WEAPONS CTR,MICHELSON LABS,CHINA LAKE,CA 93555
关键词
D O I
10.1063/1.322827
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
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页码:1284 / 1291
页数:8
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共 21 条
[1]   FORMATION OF NEW INTERMETALLIC PHASES IN BINARY EUTECTIC SYSTEMS BY DRASTIC UNDERCOOLING OF MELT [J].
ANANTHAR.TR ;
LUO, HL ;
KLEMENT, W .
NATURE, 1966, 210 (5040) :1040-&
[2]   EUTECTIC DECOMPOSITION IN GOLD-SILICON SYSTEM [J].
ANDERSEN, GA ;
BESTEL, JL ;
JOHNSON, AA ;
POST, B .
MATERIALS SCIENCE AND ENGINEERING, 1971, 7 (02) :83-&
[3]   METHODS OF SURFACE STUDIES DEPENDING ON INELASTIC-SCATTERING OF ELECTRONS [J].
BAUER, E .
VACUUM, 1972, 22 (11) :539-552
[4]  
BAUER E, 1969, STRUCTURE CHEMISTRY, P23
[5]  
BAUER E, 1972, R05030001 CONTR
[6]   LEED INVESTIGATIONS OF CLEAN AND AU-STABILISED SI SURFACES [J].
HAIDINGER, W ;
BARNES, SC .
SURFACE SCIENCE, 1970, 20 (02) :313-+
[7]   LOW-TEMPERATURE MIGRATION OF SILICON THROUGH METAL FILMS IMPORTANCE OF SILICON-METAL INTERFACE [J].
HIRAKI, A ;
LUGUJJO, E ;
NICOLET, MA ;
MAYER, JW .
PHYSICA STATUS SOLIDI A-APPLIED RESEARCH, 1971, 7 (02) :401-&
[8]   LOW-TEMPERATURE MIGRATION OF SILICON IN THIN LAYERS OF GOLD AND PLATINUM [J].
HIRAKI, A ;
NICOLET, MA ;
MAYER, JW .
APPLIED PHYSICS LETTERS, 1971, 18 (05) :178-&
[9]   FORMATION OF SILICON OXIDE OVER GOLD LAYERS ON SILICON SUBSTRATES [J].
HIRAKI, A ;
MAYER, JW ;
LUGUJJO, E .
JOURNAL OF APPLIED PHYSICS, 1972, 43 (09) :3643-&
[10]  
HIRAKI A, 1971, J VAC SCI TECHNOL, V9, P155