STUDY ON IMPURITY DIFFUSION IN THE GLOW-DISCHARGED HYDROGENATED AMORPHOUS-SILICON

被引：20
|
作者：
MATSUMURA, H [1 ]
MAEDA, M [1 ]
FURUKAWA, S [1 ]
机构：
[1] TOKYO INST TECHNOL,DEPT APPL ELECTR,MIDORI KU,YOKOHAMA,KANAGAWA 227,JAPAN
来源：
JOURNAL OF NON-CRYSTALLINE SOLIDS | 1983年 / 59-6卷 / DEC期
关键词：
D O I：
10.1016/0022-3093(83)90634-8
中图分类号：
TQ174 [陶瓷工业]; TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
引用
收藏
页码：517 / 520
页数：4
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