REVIEW OF SPUTTER NEGATIVE-ION SOURCES

被引:30
作者
MIDDLETON, R [1 ]
机构
[1] UNIV PENN,DEPT PHYS,PHILADELPHIA,PA 19174
关键词
D O I
10.1109/TNS.1976.4328413
中图分类号
TM [电工技术]; TN [电子技术、通信技术];
学科分类号
0808 ; 0809 ;
摘要
引用
收藏
页码:1098 / 1103
页数:6
相关论文
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