A NEW CORRELATION METHOD FOR IMPROVEMENT IN SELECTIVITY OF BULK TRAP MEASUREMENTS FROM CAPACITANCE AND VOLTAGE TRANSIENTS

被引：30
|
作者：
DMOWSKI, K
机构：
[1] Institute of Microelectronics and Optoelectronics, Technical University of Warsaw, 00-662 Warsaw
来源：
REVIEW OF SCIENTIFIC INSTRUMENTS | 1990年 / 61卷 / 04期
关键词：
D O I：
10.1063/1.1141180
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
A new correlation method for improvement in the selectivity of bulk trap measurements from both capacitance and voltage transients is proposed. It relies on using, for deep-level transient spectroscopy, one of the new weighting functions instead of a weighting function originally proposed by Lang. The proposed method is an extension of Lang's DLTS method. Analytical expressions for correlation signals are derived. Finally, a comparative analysis of results obtained for the proposed method with those obtained for Lang's method and the method utilizing an exponential weighting function is made.
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页码：1319 / 1325
页数：7
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