MINI-DEVICE FOR CONTROLLED QUARTZ ETCHING

被引：0
|
作者：
PENTOVELIS, G
COLLET, P
机构：
来源：
JOURNAL DE PHYSIQUE IV | 1994年 / 4卷 / C2期
关键词：
D O I：
10.1051/jp4:1994209
中图分类号：
O4 [物理学];
学科分类号：
0702 ;
摘要：
We propose a mini-device foranindividual quartz chemical etching, it is based on an electrolyte(1)/solide/electrolyte(2) double sided contact. When the electrolyte is an etching solution on either one or both sides of quartz (solide). frequency variation can be observed. The implementation of the mini-device is simple and makes automatisation of the etching procedure possible. We expose the mini-device operating and the span of its application.
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页码：73 / 77
页数：5
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