THIN-FILM INTERACTIONS OF AL AND AL (CU) ON W AND TI

被引：0
|
作者：
KRAFCSIK, I [1 ]
PALMSTROM, CJ [1 ]
GYULAI, J [1 ]
COLGAN, E [1 ]
ZINGU, E [1 ]
MAYER, JW [1 ]
机构：
[1] CORNELL UNIV,ITHACA,NY 14853
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1983年 / 130卷 / 03期
关键词：
D O I：
暂无
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：C102 / C102
页数：1
相关论文
共 50 条
  • [1] INFLUENCE OF CU AS AN IMPURITY IN AL/TI AND AL/W THIN-FILM REACTIONS
    KRAFCSIK, I
    GYULAI, J
    PALMSTROM, CJ
    MAYER, JW
    APPLIED PHYSICS LETTERS, 1983, 43 (11) : 1015 - 1017
  • [2] THIN-FILM INTERACTIONS OF AL AND AL(CU) ON TIW
    PALMSTROM, CJ
    MAYER, JW
    CUNNINGHAM, B
    CAMPBELL, DR
    TOTTA, PA
    JOURNAL OF APPLIED PHYSICS, 1985, 58 (09) : 3444 - 3448
  • [3] THIN-FILM REACTIONS OF AL WITH CO, CR, MO, TA, TI, AND W
    COLGAN, EG
    MAYER, JW
    JOURNAL OF MATERIALS RESEARCH, 1989, 4 (04) : 815 - 820
  • [4] Thin-film reactions of Al with Co, Cr, Mo, Ta, Ti and W
    Colgan, E.G., 1600, (04):
  • [5] ELECTROMIGRATION TESTING OF TI-W-AL AND TI-W-AL-CU FILM CONDUCTORS
    GHATE, PB
    BLAIR, JC
    THIN SOLID FILMS, 1978, 55 (01) : 113 - 123
  • [6] DETERMINATION OF W-TI/AL THIN-FILM INTERACTION BY SHEET RESISTANCE MEASUREMENT
    WONDERGEM, HJ
    HEGER, A
    VANDENBROEK, JJ
    THIN SOLID FILMS, 1994, 249 (01) : 6 - 10
  • [7] INTERACTIONS BETWEEN AL-1 WT-PERCENT SI THIN-FILM AND W-TI BARRIER LAYER
    CHANG, PH
    CHEN, HM
    LIU, HY
    BOHLMAN, JG
    JOURNAL OF MATERIALS SCIENCE, 1994, 29 (10) : 2697 - 2703
  • [8] THIN-FILM INTERACTIONS IN SI/SIO2/W-TI/AL-1-PERCENT SI SYSTEM
    CHANG, PH
    LIU, HY
    KEENAN, JA
    ANTHONY, JM
    BOHLMAN, JG
    JOURNAL OF APPLIED PHYSICS, 1987, 62 (06) : 2485 - 2491
  • [9] INVESTIGATION OF DIFFUSION IN CU-AL THIN-FILM SYSTEM
    GERSHINSKII, AE
    FOMIN, BI
    CHEREPOV, EI
    EDELMAN, FL
    THIN SOLID FILMS, 1977, 42 (03) : 269 - 275
  • [10] INFLUENCE OF CU AS AN IMPURITY IN AL/V THIN-FILM REACTIONS
    COLGAN, EG
    PALMSTROM, CJ
    MAYER, JW
    JOURNAL OF APPLIED PHYSICS, 1985, 58 (05) : 1838 - 1840
12345