CHEMICAL-VAPOR-DEPOSITION OF COPPER FOR ADVANCED ON-CHIP INTERCONNECTS

被引：28
|
作者：
GELATOS, AV
JAIN, A
MARSH, R
MOGAB, CJ
机构：
[1] UNIV NEW MEXICO,ALBUQUERQUE,NM 87131
[2] MOTOROLAS ADV PROD RES & DEV LAB,AUSTIN,TX
来源：
MRS BULLETIN | 1994年 / 19卷 / 08期
关键词：
D O I：
10.1557/S0883769400047734
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
[No abstract available]
引用
收藏
页码：49 / 54
页数：6
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