GENERATION OF ELECTRON-CYCLOTRON RESONANCE PLASMAS USING A CIRCULAR TE01 MODE MICROWAVE

被引：9
|
作者：
HIDAKA, R [1 ]
HIROTSU, N [1 ]
TANAKA, N [1 ]
KAWAI, Y [1 ]
机构：
[1] KYUSHU UNIV,INTERDISCIPLINARY GRAD SCH ENGN SCI,KASUGA,FUKUOKA 816,JAPAN
来源：
JOURNAL OF APPLIED PHYSICS | 1992年 / 72卷 / 09期
关键词：
D O I：
10.1063/1.352187
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
An electron cyclotron resonance plasma using a circular TE01 mode microwave is generated to achieve larger diameters. It is shown that the input power of the circular TE01 mode is efficiently consumed to generate electron cyclotron resonance plasmas. The density and temperature of electrons is around 10(12) cm-3 and 3-5 eV at 5 kW input power, respectively.
引用
收藏
页码：4461 / 4462
页数：2
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