TRANSPORT-PROPERTIES OF MULTILAYERED CR/SIOX THIN-FILMS

被引：5
|
作者：
TANIELIAN, MH [1 ]
WILLHITE, JR [1 ]
NIARCHOS, D [1 ]
机构：
[1] IIT,CHICAGO,IL 60616
来源：
JOURNAL OF APPLIED PHYSICS | 1984年 / 56卷 / 02期
关键词：
D O I：
10.1063/1.333980
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：417 / 420
页数：4
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