MAGNETRON ION ETCHER IS DRY ALTERNATIVE TO WET ETCHING

被引：0
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作者：
BROWNE, J
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来源：
MICROWAVES & RF | 1983年 / 22卷 / 08期
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中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
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页码：109 / &
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