INFLUENCE OF GROWTH TEMPERATURE ON THE PHYSICAL-PROPERTIES OF SI FILMS ON YTTRIA-STABILIZED, CUBIC ZIRCONIA SUBSTRATES

被引：3
|
作者：
LIN, AL
GOLECKI, I
机构：
来源：
JOURNAL OF THE ELECTROCHEMICAL SOCIETY | 1985年 / 132卷 / 01期
关键词：
D O I：
10.1149/1.2113771
中图分类号：
O646 [电化学、电解、磁化学];
学科分类号：
081704 ;
摘要：
引用
收藏
页码：239 / 244
页数：6
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