CLEAN ROOMS FOR ULSI MANUFACTURING - CLASS-1 PRACTICE

被引：0
|
作者：
BURNETT, J
机构：
来源：
SOLID STATE TECHNOLOGY | 1985年 / 28卷 / 09期
关键词：
D O I：
暂无
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
引用
收藏
页码：121 / 123
页数：3
相关论文
共 50 条
  • [1] BEYOND CLASS-1 CLEAN ROOMS - PARTICLE CONTAMINATION DETECTION IN ULTRA CLEAN ENVIRONMENTS
    SOMMER, HT
    PROCEEDINGS - MICROCONTAMINATION 89 : CONFERENCE AND EXPOSITION, 1989, : 358 - 365
  • [2] ULTRA CLEAN PROCESSING FOR ULSI MANUFACTURING
    OHMI, T
    DENKI KAGAKU, 1988, 56 (11): : 916 - 920
  • [3] IC PRODUCTION - SILICONIX JOINS CLASS-1 CLEAN-ROOM ELITE
    BARNEY, C
    ELECTRONICS-US, 1985, 58 (46): : 34 - 34
  • [4] CLEAN ROOMS ENSURE QUALITY MANUFACTURING ENVIRONMENT.
    Morhard, Waldemar H.
    Plant Engineering (Barrington, Illinois), 1986, 40 (12): : 52 - 54
  • [5] Statistical Control of Ensuring the Required Class of Clean Rooms
    Sharaeva, Valeria P.
    Kharlamov, Nikolai R.
    Riabyshenkov, Andrei S.
    Karakeyan, Valery, I
    Gundartcev, Mikhail A.
    PROCEEDINGS OF THE 2021 IEEE CONFERENCE OF RUSSIAN YOUNG RESEARCHERS IN ELECTRICAL AND ELECTRONIC ENGINEERING (ELCONRUS), 2021, : 2887 - 2890
  • [6] THEORY AND PRACTICE DURING CONSTRUCTION AND MAINTENANCE OF CLEAN ROOMS
    GEILLEIT, RAHM
    ANTONIE VAN LEEUWENHOEK JOURNAL OF MICROBIOLOGY, 1980, 46 (05): : 503 - 503
  • [7] A CLASSIFICATION OF BAIRE CLASS-1 FUNCTIONS
    KECHRIS, AS
    LOUVEAU, A
    TRANSACTIONS OF THE AMERICAN MATHEMATICAL SOCIETY, 1990, 318 (01) : 209 - 236
  • [8] SUBCLASSES OF BAIRE CLASS-1 FUNCTIONS
    PEEK, DE
    NOTICES OF THE AMERICAN MATHEMATICAL SOCIETY, 1970, 17 (07): : 1031 - &
  • [9] SUBGROUPS OF CLASS-1 ANTIARRHYTHMIC DRUGS
    WILLIAMS, EMV
    EUROPEAN HEART JOURNAL, 1984, 5 (02) : 96 - 98
  • [10] MORICIZINE - A NEW CLASS-1 ANTIARRHYTHMIC
    MANN, HJ
    CLINICAL PHARMACY, 1990, 9 (11): : 842 - &
12345