HIGH-RATE SPUTTER TECHNIQUE

被引：0
|
作者：
SCHILLER, S
HEISIG, U
GOEDICKE, K
机构：
来源：
VAKUUM-TECHNIK | 1983年 / 32卷 / 02期
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D O I：
暂无
中图分类号：
TH [机械、仪表工业];
学科分类号：
0802 ;
摘要：
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页码：35 / 47
页数：13
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