PATTERNING SELF-ASSEMBLED MULTILAYERS USING UV LITHOGRAPHY

被引：0
|
作者：
PAGE, CJ [1 ]
NEFF, GA [1 ]
MAHON, TM [1 ]
机构：
[1] UNIV OREGON,DEPT CHEM,EUGENE,OR 97403
来源：
ABSTRACTS OF PAPERS OF THE AMERICAN CHEMICAL SOCIETY | 1995年 / 210卷
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中图分类号：
O6 [化学];
学科分类号：
0703 ;
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页码：280 / PHYS
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