ATOMIC-FORCE MICROSCOPY FOR THIN-FILM ANALYSIS

被引：13
|
作者：
PHILLIPS, RW
机构：
[1] Flex Products Inc. (Joint Venture Company of ICI Americas Inc. and OCLI), Santa Rosa, CA 95407
来源：
SURFACE & COATINGS TECHNOLOGY | 1994年 / 68卷
关键词：
Optical data bits - Stylus method - Surface effects - Surface morphology - Thin film analysis;
D O I：
10.1016/0257-8972(94)90251-8
中图分类号：
TB3 [工程材料学];
学科分类号：
0805 ; 080502 ;
摘要：
Atomic force microscopy (AFM) was used to study a variety of surface effects present in embossed structures, thin film coatings, and polymeric substrates. Comparisons between scanning electron microscopy (SEM), optical microscopy and stylus methods of characterizing surface morphology show that AFM reveals information in three-dimensional format not previously available.
引用
收藏
页码：770 / 775
页数：6
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