ELECTRICAL AND OPTICAL-PROPERTIES OF SPUTTERED TINX FILMS AS A FUNCTION OF SUBSTRATE DEPOSITION TEMPERATURE

被引：15
|
作者：
THORPE, TP
QADRI, SB
WOLF, SA
CLAASSEN, JH
机构：
来源：
APPLIED PHYSICS LETTERS | 1986年 / 49卷 / 19期
关键词：
D O I：
10.1063/1.97425
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
引用
收藏
页码：1239 / 1241
页数：3
相关论文
共 50 条
  • [1] OPTICAL-PROPERTIES OF SPUTTERED AU-TINX COMPOSITE THIN-FILMS
    LUTHIER, R
    LEVY, F
    HELVETICA PHYSICA ACTA, 1987, 60 (5-6): : 853 - 853
  • [2] OPTICAL-PROPERTIES OF SELECTIVE REFLECTION TINX FILMS
    ANTONOVA, K
    GRIGOROV, G
    MARTEV, I
    YAKOVLEV, V
    ZHIZHIN, G
    THIN SOLID FILMS, 1992, 219 (1-2) : 157 - 161
  • [3] THE EFFECT OF VARYING SUBSTRATE-TEMPERATURE ON THE STRUCTURAL AND OPTICAL-PROPERTIES OF SPUTTERED GAAS FILMS
    BAKER, SH
    BAYLISS, SC
    GURMAN, SJ
    ELGUN, N
    BATES, JS
    DAVIS, EA
    JOURNAL OF PHYSICS-CONDENSED MATTER, 1993, 5 (05) : 519 - 534
  • [4] OPTICAL-PROPERTIES OF SPUTTERED FILMS
    KRIKORIAN, E
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1978, 15 (02): : 260 - 260
  • [5] OPTICAL-PROPERTIES OF SPUTTERED FILMS
    KRIKORIAN, E
    JOURNAL OF THE OPTICAL SOCIETY OF AMERICA, 1976, 66 (02) : 164 - 165
  • [6] Optical and electronic properties of sputtered TiNx thin films
    Schmid, PE
    Sunaga, MS
    Levy, F
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1998, 16 (05): : 2870 - 2875
  • [7] ELECTRICAL AND OPTICAL-PROPERTIES OF ION-BEAM SPUTTERED ZONAL FILMS AS A FUNCTION OF FILM THICKNESS
    QU, Y
    GESSERT, TA
    RAMANATHAN, K
    DHERE, RG
    NOUFI, R
    COUTTS, TJ
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY A-VACUUM SURFACES AND FILMS, 1993, 11 (04): : 996 - 1000
  • [8] ELECTRICAL AND OPTICAL-PROPERTIES OF REACTIVELY SPUTTERED TUNGSTEN-OXIDE FILMS
    MIYAKE, K
    KANEKO, H
    TERAMOTO, Y
    JOURNAL OF APPLIED PHYSICS, 1982, 53 (03) : 1511 - 1515
  • [9] ELECTRICAL AND OPTICAL-PROPERTIES OF BIAS SPUTTERED ZNO THIN-FILMS
    CAPORALETTI, O
    SOLAR ENERGY MATERIALS, 1982, 7 (01): : 65 - 73
  • [10] ELECTRICAL AND OPTICAL-PROPERTIES OF RF TRIODE-SPUTTERED AU FILMS
    CORNELY, RH
    FUSCHILL.N
    JOURNAL OF VACUUM SCIENCE & TECHNOLOGY, 1974, 11 (01): : 163 - 166
12345