PLASMA AND CHEMICAL OXIDES ON (N)INP - OPTICAL AND ELECTRICAL CHARACTERIZATION

被引:7
|
作者
MICHEL, C [1 ]
GUILLOT, JM [1 ]
LEPLEY, B [1 ]
DUPONTPAVLOVSKY, N [1 ]
KARNICKAMOSCICKA, K [1 ]
机构
[1] CNRS,LAB MAURICE LETORT,F-54600 VILLERS LES NANCY,FRANCE
关键词
D O I
10.1088/0022-3727/16/11/025
中图分类号
O59 [应用物理学];
学科分类号
摘要
引用
收藏
页码:2229 / 2237
页数:9
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