INTERACTION OF LOW-ENERGY ELECTRONS WITH THE ELECTRON-BEAM RESIST POLY(BUTENE-1-SULFONE)

被引：8
|
作者：
ASHLEY, JC
机构：
来源：
JOURNAL OF APPLIED PHYSICS | 1988年 / 63卷 / 09期
关键词：
D O I：
10.1063/1.340141
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
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页码：4620 / 4625
页数：6
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