ION-BEAM MILLING OF INP WITH AN AR/O2-GAS MIXTURE

被引：37

作者：

KATZSCHNER, W

STECKENBORN, A

LOFFLER, R

GROTE, N

机构：

来源：

APPLIED PHYSICS LETTERS | 1984年 / 44卷 / 03期

关键词：

D O I：

10.1063/1.94725

中图分类号：

O59 [应用物理学];

学科分类号：

摘要：

引用

页码：352 / 354

页数：3

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