IN-SITU TRANSMISSION ELECTRON-MICROSCOPY OBSERVATION OF SINGLE CRYSTALLIZATION OF FILLED ALUMINUM INTERCONNECTION

被引：3
|
作者：
WADA, J
TOYODA, H
KANEKO, H
HAYASAKA, N
YASUDA, H
MORI, H
OKANO, H
机构：
[1] OSAKA UNIV, ULTRA HIGH VOLTAGE ELECTRON MICROSCOPY RES CTR, SUITA, OSAKA 565, JAPAN
[2] APPL MAT JAPAN INC, CTR TECHNOL, NARITA, CHIBA 286, JAPAN
来源：
JAPANESE JOURNAL OF APPLIED PHYSICS PART 2-LETTERS & EXPRESS LETTERS | 1995年 / 34卷 / 10A期
关键词：
IN SITU TEM; SINGLE CRYSTAL; ALUMINUM; FILLED INTERCONNECTION; SUPERCOOLING;
D O I：
10.1143/JJAP.34.L1260
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
In situ transmission electron microscopy (TEM) observation was carried out to clarify the aluminum single-crystallization mechanism. Aluminum filling into the grooves formed on an amorphous insulator completed at 903 K, which was 30 K below the melting point of pure aluminum, It was found that aluminum remained in the liquid state even at temperatures more than 80 K below its melting point. It is concluded that this supercooled aluminum state is essential to the fabrication of single-crystal aluminum lines, because this state enables fast solidification and suppresses polynucleations.
引用
收藏
页码：L1260 / L1262
页数：3
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