RF-MEMS RESONATOR DESIGN FOR PARAMETER CHARACTERIZATION

被引：1
|
作者：
Roy, Ambarish [1 ]
Barber, Bradley P. [2 ]
Prasad, Kanti [1 ]
机构：
[1] Univ Massachusetts, ECE Dept, Lowell, MA 01854 USA
[2] Skyworks Solut Inc, Woburn, MA USA
来源：
IEEE INTERNATIONAL SOC CONFERENCE, PROCEEDINGS | 2009年
关键词：
D O I：
10.1109/SOCCON.2009.5398037
中图分类号：
TM [电工技术]; TN [电子技术、通信技术];
学科分类号：
0808 ; 0809 ;
摘要：
A unique methodology involving Bulk Acoustic Wave (BAW) Solidly Mounted Resonators (SMRs) is presented in this paper which can be used to extract precise materials information that is vital to designing high performance RF filters. The novel approach allows simultaneous extraction of multiple parameters for multiple materials. Changes in materials properties over temperature can also be extracted.
引用
收藏
页码：295 / +
页数：2
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