IMPORTANT CONSIDERATIONS IN SELECTING ANISOTROPIC-PLASMA ETCHING EQUIPMENT

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作者：

BROYDO, S

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SOLID STATE TECHNOLOGY | 1983年 / 26卷 / 04期

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TM [电工技术]; TN [电子技术、通信技术];

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0808 ; 0809 ;

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页码：159 / 165

页数：7

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