EFFECT OF THE INSIDE PROFILE OF A HOLLOW-CATHODE ON THE PLASMA PLUME

被引:4
|
作者
GANDHI, VJ
MAHAJAN, SM
机构
[1] Electrical Engineering Department, Tennessee Technological University, Cookeville
关键词
D O I
10.1109/27.256768
中图分类号
O35 [流体力学]; O53 [等离子体物理学];
学科分类号
070204 ; 080103 ; 080704 ;
摘要
The effect of the inside profile of a hollow cathode on the intensity of plasma plume has been studied in a low-pressure (approximately 3 torr) argon discharge. The effectiveness of three different "inside" profiles of a hollow cathode was compared by performing emission spectroscopy on the plasma plume in each case. A conical-profile hollow cathode produced a plasma plume that was much more intense than the one in a commonly used cylindrical-profile hollow cathode.
引用
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页码:410 / 412
页数:3
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