INTERFACE STRUCTURES IN LATERAL SEEDING EPITAXIAL SI ON SIO2

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作者：
OGURA, A
AIZAKI, N
TERAO, H
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CHARACTERIZATION OF THE STRUCTURE AND CHEMISTRY OF DEFECTS IN MATERIALS | 1989年 / 138卷
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T [工业技术];
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08 ;
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页码：361 / 366
页数：6
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