TEXTURAL CHARACTERISTICS AND ELECTRICAL PROPERTIES OF VACUUM EVAPORATED SILICON FILMS

被引：19
|
作者：
MOUNTVAL.AJ
ABOWITZ, G
机构：
来源：
VACUUM | 1965年 / 15卷 / 07期
关键词：
D O I：
10.1016/0042-207X(65)91085-7
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
引用
收藏
页码：359 / &
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