ANALYSIS OF STRAIN AND MOSAICITY IN A SHORT-PERIOD SI9GE6 SUPERLATTICE BY X-RAY-DIFFRACTION

被引：24
|
作者：
KOPPENSTEINER, E
HAMBERGER, P
BAUER, G
HOLY, V
KASPER, E
机构：
[1] MASARYK UNIV,DEPT SOLID STATE PHYS,CS-61137 BRNO,CZECH REPUBLIC
[2] DAIMLER BENZ AG,RES CTR,W-7900 ULM,GERMANY
来源：
APPLIED PHYSICS LETTERS | 1994年 / 64卷 / 02期
关键词：
D O I：
10.1063/1.111555
中图分类号：
O59 [应用物理学];
学科分类号：
摘要：
Triple axis x-ray diffractometry was employed for the structural characterization of a 100 period Si9Ge6 superlattice grown by molecular beam epitaxy on a thick step-graded SiGe alloy buffer. From the distribution of diffusely scattered intensity around reciprocal lattice points the correlation function of the deformation field due to structural defects has been calculated using kinematical theory of x-ray diffraction. From the extension of the correlation function it turns out that on the average the entire superlattice (0.2 mu m thick) scatters coherently along growth direction, whereas laterally the coherently scattering regions are extended only over about 40 nm.
引用
收藏
页码：172 / 174
页数：3
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