ACCELERATION SENSORS IN SILICON TECHNOLOGY

被引：0
|
作者：
SCHUBERT, D
机构：
来源：
TECHNISCHES MESSEN | 1995年 / 62卷 / 11期
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D O I：
暂无
中图分类号：
TH7 [仪器、仪表];
学科分类号：
0804 ; 080401 ; 081102 ;
摘要：
Silicon micromachined structures are widely used for piezoresistive and capacitive accelerometers. This paper describes structures, fabrication technologies and sensor designs. The system response an the effect of cross sensitivities will be discussed and compared to the characteristics of selected samples.
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页码：424 / 431
页数：8
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