ERROR IN MEASURING THE CARBON CONCENTRATION IN SINGLE-CRYSTAL SILICON FROM INFRARED-ABSORPTION

被引：0
|
作者：
DANKOVSKII, YV
ILIN, MA
KOVARSKII, VY
机构：
来源：
MEASUREMENT TECHNIQUES USSR | 1982年 / 25卷 / 05期
关键词：
D O I：
10.1007/BF00825104
中图分类号：
T [工业技术];
学科分类号：
08 ;
摘要：
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页码：443 / 445
页数：3
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