Fabrication of ion-trap electrodes by self-terminated electrochemical etching

被引：6
|
作者：
Zhao Wang
Le Luo
Karthik Thadasina
Kim Qian
Jinming Cui
Yunfeng Huang
机构：
[1] [1,2,Wang, Zhao
[2] Luo, Le
[3] 2,Thadasina, Karthik
[4] 2,Qian, Kim
[5] 1,Cui, Jinming
[6] 1,Huang, Yunfeng
来源：
Luo, Le (leluo@iupui.edu) | 1600年 / Springer Science and Business Media Deutschland GmbH卷 / 03期
关键词：
Atomic force microscopy - Fabrication - Reactive ion etching - Electrochemical etching - Electrochemical electrodes - Ions - Scanning electron microscopy;
D O I：
10.1140/epjti/s40485-016-0030-5
中图分类号：
学科分类号：
摘要：
Self-terminated electrochemical etching is applied to fabricate needle electrodes for ion traps. We study the surface morphology of the electrodes with scanning electron microscopy and atomic force microscopy, and find that the surface curvature and roughness can be reduced by optimizing the etching parameters. Our method provides a convenient and low-cost solution to improve the surface quality of electrodes for ion traps. © 2016, Wang et al.; licensee Springer.
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