Generation of microstructures and extreme sub-wavelength laser-induced periodic structures on the Si surface using N2\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\hbox {N}_{2}$$\end{document} nanosecond pulsed laser for the reduction of reflectance

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作者
P Chandrakanta Singh
Susanta Kumar Das
机构
[1] Kalinga Institute of Industrial Technology Deemed to be University,Department of Physics, School of Applied Sciences
[2] Gangadhar Meher University,School of Physics
关键词
Nitrogen laser; microstructures; sub-wavelength laser-induced periodic surface structures; total reflectance; 47.85.M−; 85.60.−q; 81.40.−z; 78.67.−n;
D O I
10.1007/s12043-020-02051-3
中图分类号
学科分类号
摘要
A detailed study is done on the growth of microstructures and sub-wavelength laser-induced periodic surface structures (LIPSSs) on silicon (Si) surface using nitrogen (N2)\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\hbox {N}_{2})$$\end{document} nanosecond (ns) laser processing in air. The period of LIPSS is found to be as small as 37 nm which is close to λ/9\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$\lambda /9$$\end{document} times the irradiated laser wavelength (337 nm). In the optimised condition the sums total of reflectance (specular reflectance +\documentclass[12pt]{minimal} \usepackage{amsmath} \usepackage{wasysym} \usepackage{amsfonts} \usepackage{amssymb} \usepackage{amsbsy} \usepackage{mathrsfs} \usepackage{upgreek} \setlength{\oddsidemargin}{-69pt} \begin{document}$$+$$\end{document} diffuse reflectance) was found to be as low as 10% for a broad wavelength range. The reflectance behaviour has been correlated with the morphology of the generated microstructures.
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