A novel MEMS nano-tribometer for dynamic testing in-situ in SEM and TEM

被引：0
|
作者：
A. V. Desai
M. A. Haque
机构：
[1] The Pennsylvania State University,Department of Mechanical and Nuclear Engineering Department
来源：
Tribology Letters | 2005年 / 18卷
关键词：
MEMS; nano-tribology; micro-tribology; tribometer; capacitive sensing;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
We present the design and fabrication of a micro-electro-mechanical (MEMS) tribometer with normal and lateral force resolutions of 100 and 1 nano-Newton, respectively and bandwidth of 50 kHz. The small size of the tribometer (2 × 2 × 0.3 mm) allows simultaneously quantitative and qualitative dynamic testing in electron microscopes.
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页码：13 / 19
页数：6
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