Combined effect of substrate temperature and laser energy density on laser ablated BiFeO3 thin films

Bismuth ferrite (BiFeO3) thin films were prepared on Pt(111)/Ti/SiO2/Si substrates by laser ablation deposition at various substrate temperature (Tsub) and laser energy density (DL). The combined effect of Tsub and DL on crystalline phase, preferential orientation and surface morphology of the films were investigated. The microstructure and morphology of the films showed a strong dependence on Tsub and DL simultaneously. BiFeO3 thin films with single phase could be prepared at Tsub-DL of 893 K−1 J/cm2, 943 K−2 J/cm2 and 963 K−3 J/cm2, respectively. Film deposited at Tsub = 963 K and DL = 3 J/cm2 exhibited better ferroelectric property due to the combination of high (111) preferential orientation, dense surface morphology and less Fe2+ content.