Effect of Hydrogen in Size-Limited Growth of Graphene by Atmospheric Pressure Chemical Vapor Deposition

Analysis of graphene domain synthesis explains the main graphene growth process. Size-limited graphene growth caused by hydrogen is studied to achieve efficient graphene synthesis. Graphene synthesis on Cu foils via the chemical vapor deposition method using methane as carbon source is limited by high hydrogen concentration. Results indicate that hydrogen affects graphene nucleation, the growth rate, and the final domain size. Considering the role of hydrogen as both activator and etching reagent, we build a model to explain the cause of this low graphene growth rate for high hydrogen partial pressure. A two-step method is proposed to control the graphene nucleation and growth rate separately. Half the time is required to obtain similar domain size compared with single-step synthesis, indicating improved graphene synthesis efficiency. The change of the partial pressure and transmission time between the two steps is a factor that cannot be ignored to control the graphene growth.