Technology of microthermoforming of complex three-dimensional parts with multiscale features

被引:0
|
作者
Markus Heilig
Marc Schneider
Heinz Dinglreiter
Matthias Worgull
机构
[1] Karlsruhe Institute of Technology (KIT),
[2] Institute for Microstructure Technology (IMT),undefined
来源
Microsystem Technologies | 2011年 / 17卷
关键词
Polymer Film; Thin Polymer Film; Mould Insert; PMMA Film; Substrate Plate;
D O I
暂无
中图分类号
学科分类号
摘要
Thermoforming parts with micro-scale design features require use of thin polymer films. Low heat capacity and fragility of thin (<100 μm) polymer films requires new technical developments for precise heating and form pressure application. This paper will present results of an improved process based on a new replication machine. Temperature stability and pressure distribution is highly improved, even at reduced cycle times. With an upgraded temperature range microthermoforming of high temperature polymers is possible. This technology is well suited for the replication of three-dimensional micro parts with multiscale features. Replication of hollow parts with multiscale features is also possible. Outer dimension in macroscopic length scale and functional design features in microscopic length scale are combined with nanoscale surface structures in an affordable technology.
引用
收藏
页码:593 / 600
页数:7
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