Plasma Interaction with Boundary Surfaces in Low-Pressure Radio-Frequency Capacitive Discharge

被引：0
|
作者：
V. P. Savinov
M. S. Kruglov
V. A. Riaby
A. V. Chervyakov
V. G. Yakunin
机构：
[1] Moscow State University,
[2] Pacific National University,undefined
[3] Moscow Aviation Institute (National Research University),undefined
来源：
Physics of Atomic Nuclei | 2019年 / 82卷
关键词：
plasma; boundary surfaces; RF capacitive discharge; near-electrode layer of space charge; beam-plasma instability; caviton; electron emission; electron beams;
D O I：
暂无
中图分类号：
学科分类号：
摘要：
A particular case of a problem on interaction of plasma with a surface is examined experimentally. We study interaction of its own plasma with boundary surfaces in a low-pressure radio-frequency (RF) capacitive discharge (RFCD) by considering their functions. On the basis of the physical model of RFCD substantiated earlier, we examine experimentally the physical conditions taking place in a near-electrode layer of space discharge, which lead to formation of pulsed electron beams and highly non-equilibrium plasma electron energy spectrum. We verify experimentally the known fact that in RFCD it is possible to generate natural oscillating LC circuits modulating the discharge current, and the conditions of their excitation by their own electron beams are clarified.
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页码：1433 / 1436
页数：3
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