Characteristics of Hydrogen Sensors Based on Thin Tin Dioxide Films Modified with Platinum, Palladium, Silver, and Yttrium

The dependence of the characteristics of hydrogen sensors based on thin Pt/Pd/SnO2:Sb, Ag, Y and Ag/SnO2:Sb, Ag, Y films obtained by the method of magnetron sputtering at a direct current on the humidity level of the gas mixture during operation in thermal cyclic mode is investigated. The analysis of the experimental data was carried out using the expressions obtained on the basis of the dissociative adsorption model of hydrogen and water molecules on the SnO2 surface, taking into account the presence of three types of adsorbed particles: O–, OH, OН–. The use of complex modifiers Pt/Pd, Ag on the surface and Ag + Y in the bulk of tin dioxide films allows to reduce the influence of humidity on the characteristics of sensors. The role of these modifying additives in the process of dissociative adsorption of hydrogen molecules on the surface of SnO2 films in humid environment is established.