The Influence of Nitrogen Partial Pressure on the Composition, Microstructure, and Mechanical Characteristics of Ti1 –x–yAlxTаyN Coatings Obtained by Reactive Magnetron Sputtering

被引：0
|
作者：
A. R. Shugurov
A. A. Akulinkin
A. M. Kasterov
M. P. Kalashnikov
机构：
[1] Institute of Strength Physics and Materials Science,
[2] Siberian Branch,undefined
[3] Russian Academy of Sciences,undefined
[4] Tomsk Scientific Center,undefined
[5] Siberian Branch,undefined
[6] Russian Academy of Sciences,undefined
来源：
Technical Physics Letters | 2019年 / 45卷
关键词：
D O I：
暂无
中图分类号：
学科分类号：
摘要：
引用
收藏
页码：418 / 422
页数：4
相关论文
共 39 条
  • [1] The Influence of Nitrogen Partial Pressure on the Composition, Microstructure, and Mechanical Characteristics of Ti1-x - yAlxTayN Coatings Obtained by Reactive Magnetron Sputtering
    Shugurov, A. R.
    Akulinkin, A. A.
    Kasterov, A. M.
    Kalashnikov, M. P.
    TECHNICAL PHYSICS LETTERS, 2019, 45 (04) : 418 - 422
  • [2] BITAVOX coatings obtained by reactive magnetron sputtering: Influence of thickness and composition
    Dereeper, E.
    Briois, P.
    Billard, A.
    SOLID STATE IONICS, 2017, 304 : 7 - 12
  • [3] Effect of nitrogen partial pressure on the electrochemical evaluation of (Ti-Al)N coatings deposited by reactive magnetron sputtering
    Singh, K
    Grover, AK
    Totlani, MK
    Suri, AK
    TRANSACTIONS OF THE INSTITUTE OF METAL FINISHING, 2001, 79 (05): : 190 - 194
  • [4] Effects of nitrogen partial pressure on microstructure, morphology and N/Ti ratio of TiN films deposited by reactive magnetron sputtering
    Yang, K.
    Jiang, J. Q.
    Gu, M. Y.
    MATERIALS SCIENCE AND TECHNOLOGY, 2007, 23 (08) : 958 - 962
  • [5] Effect of Nitrogen Partial Pressure on the Structural, Mechanical, and Electrical Properties of (CrHfNbTaTiVZr)N Coatings Deposited by Reactive Magnetron Sputtering
    Tsai, Du-Cheng
    Chen, Erh-Chiang
    Chang, Zue-Chin
    Shieu, Fuh-Sheng
    COATINGS, 2022, 12 (04)
  • [6] Effect of sputtering power on the chemical composition, microstructure and mechanical properties of CrNx hard coatings deposited by reactive magnetron sputtering
    Qi, Zhengbing
    Wu, Zhengtao
    Zhang, Dongfang
    Wei, Binbin
    Wang, Jinhuo
    Wang, Zhoucheng
    VACUUM, 2017, 145 : 136 - 143
  • [7] The influence of temperature and nitrogen pressure on S-phase coatings deposition by reactive magnetron sputtering
    Baranowska, J.
    Fryska, S.
    Suszko, T.
    VACUUM, 2013, 90 : 160 - 164
  • [8] Influence of N2 partial pressure on mechanical properties of (Ti,Al)N films deposited by reactive magnetron sputtering
    Zhou, Tao
    Nie, Pulin
    Cai, Xun
    Chu, Paul K.
    VACUUM, 2009, 83 (07) : 1057 - 1059
  • [9] Influence of the Parameters of Middle Frequency Magnetron Sputtering on the Elemental Composition, Microstructure, and Mechanical Properties of Ti-Al-Ta-N Coatings
    Shugurov, A. R.
    Garanin, Yu. A.
    Kuzminov, E. D.
    RUSSIAN PHYSICS JOURNAL, 2024, 67 (04) : 373 - 380
  • [10] EFFECT OF NITROGEN PARTIAL PRESSURE ON REACTIVE MAGNETRON SPUTTERING FROM Ti13Cu87 METALLOID TARGET: SIMULATION OF CHEMICAL COMPOSITION
    Rahmati, A.
    Khanzadeh, M.
    UKRAINIAN JOURNAL OF PHYSICS, 2012, 57 (06): : 642 - 647
1234