Sol–gel deposition of Al-doped ZnO thin films: effect of additional zinc supply

被引：0

作者：

Koji Abe

Tasuku Kubota

机构：

[1] Nagoya Institute of Technology,Department of Electrical and Mechanical Engineering

[2] Gokiso,undefined

[3] Showa,undefined

来源：

Journal of Sol-Gel Science and Technology | 2023年 / 108卷

关键词：

Zinc oxide; Transparent conductive oxide; Sol–gel; Dip-coating;

D O I：

暂无

中图分类号：

学科分类号：

摘要：

Low-resistivity Al-doped ZnO (AZO) films were deposited by sol-gel method using glass substrates with a zinc layer.The AZO films after calcination annealing were transparent. The average transmittance (400–800 nm) of the AZO films was above 86%.The AZO film deposited on the glass substrate with a 100-nm-thick zinc layer had a resistivity of 9.4 × 10−4 Ω cm.

引用

页码：28 / 34

页数：6

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