Trapezoidal-shaped electrostatic comb-drive actuator with large displacement and high driving force density

被引：0
|
作者：
Phuc Hong Pham
Kien Trung Hoang
Dich Quang Nguyen
机构：
[1] Hanoi University of Science and Technology (HUST),School of Mechanical Engineering
[2] Hanoi University of Science and Technology (HUST),Institute for Control Engineering and Automation
来源：
Microsystem Technologies | 2019年 / 25卷
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摘要：
This paper presents a design of a comb finger shape and calculation of a trapezoidal-shaped electrostatic comb-drive actuator (TECA) in order to aim a higher electrostatic force density and larger displacement in comparison with the typical rectangular-shaped electrostatic comb-drive actuator (RECA). Relation between a beam’s stiffness and a driving voltage has been examined to predict a pull-in effect occurring in TECA. Micro fabrication and characterization of TECA and RECA systems are performed by using a standard SOI-MEMS technology. Theoretical and experimental results confirm the strong points of TECA’s structure (similar to the dimensions of RECA) such as a larger number of movable comb finger arrayed at the same length and larger displacement. At driving voltages of 47.9 and 50 (V), the calculation and measurement displacement of TECA are approximately 2.2 and 1.78 times larger than that of RECA, respectively.
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页码：3111 / 3118
页数：7
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